Argon
Compressed argon gas and liquid argon in a variety of purities and in various modes of supply around the world thanks to our network of storage and transfill facilities.
半导体
我们帮助您在您的晶圆制造达到下一个节点工艺
当今的半导体工艺面临极高的可靠性和良率预期。 您需要确保工艺纯度和设备可用性达到您的期望。空气产品公司致力于成为全球半导体制造商首选合作伙伴。 我们提供一系列超高纯度载气，设备及服务，可帮助您实现高标准、稳定可靠的半导体制造工艺。
全球领先的半导体行业气体供应商
我们的产品，设备和服务核心能力包括：
- 多种供应模式，包括现场生产，大宗供应和 Microbulk 供应
- 超高纯度载气，包括氮气，氧气，氢气，氦气和氩气
- 超高纯度工艺气体，稀有气体及混合气体
- 设计，制造和安装所有相关设备
- 按时满足需求的出色记录
- 全球安全记录最佳的化工企业之一
气体
Air Products 通常以气态和液态形式供应工业气体，可让各行各业的客户提高其环保性，产品质量和生产率。
Helium
An inert gas for cryogenic, heat transfer, shielding, leak detection, analytical and lifting applications
Hydrogen
Valued for its reactive and protective properties, and used by many industries such as electronics, foods, glass, chemicals, refining and more can benefit from its unique properties to improve quality, optimize performance and reduce costs.
Nitrogen
Useful as a gas, for its inert properties, and as a liquid for cooling and freezing. Virtually any industry can benefit from its unique properties to improve yields, optimize performance and make operations safer.
Oxygen
In addition to its use as a respiratory gas for healthcare applications, its strong oxidizing properties benefit many industries by improving yields, optimizing performance, lowering costs and reducing carbon footprint compared to other fuels.
Rare Gases
Useful as ion beam sources to clean, cut or weld materials as well as their unique ability to produce bright light, which may be in the form of a laser or a light source. Also used in propulsion engines or in window insulation.
Speciality Gases
UHP gases, process, calibration and ISO 17025 accredited mixtures in a wide range of supply modes.
氙气回收
- 氙气是一种高价值材料，可以回收，纯化后再利用
- 氙气回收是 Air Products 专有/专利技术，旨在从半导体晶圆厂的工艺废气中回收氙气
- 利用 Air Products 吸附技术经验开发概念
- 在客户现场操作和维护
咨询专家
“能否为我的半导体晶圆厂提供合适的气体纯化系统指导？”
没有一种系统可以一次纯化您的所有工艺气体。 根据需要纯化的气体，必须去除的杂质，气体流量和所需的最终纯度，有各种类型的纯化器可供选择，既有大型背板系统，也有小型使用点系统。 我们可以根据您的要求协助您确定正确的系统。
任何疑问？ 我们提供了答案。
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